Plasma power supplies

RF, MF, DC & pulse DC power supplies

Neyco offers a wide range of plasma power supplies, that meet your needs both in Resarch and in Industry:

• from 100 W to 2500 W with RF
• from 5 kW to 15kW with MF
• from 0.5 kW to 30 kW with DC
• available with pulse efor RF, MF and DC
• BIAS in option
• with or without activ front panel
• RS232 or Profibus
• cooling by air

Some of our plasma power supplies are described in the pdf document below.