Thin films

Refractory materials

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Information guide

PBN PG ceramic heaters : 

The heating elements are made from a Pyrolytic Graphite (PG) electrical conductor, covered with a refractory insulator, Pyrolytic Boron Nitride (PBN).


  • UHV compatible
  • very good temperature homogeneity
  • operating temperature: 1500°C and higher
  • mechanically durable
  • termally shock resistant
  • power density: > 35 W/cm2
  • chemically inert to most corrosive gases


  • PVD and PECVD
  • Ion implantation
  • CVD and MOCVD
  • PLD (laser ablation)

Specific dimensions on request. 

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Thin films

Disc heaters PBN/PG

Thin films

Disc heaters PBN/PG with tabs

Thin films

Rectangular PBN heaters