Thin films

Deposition systems

You have a question ?

You can reach us by phone on +33 (0)1 41 90 50 50 or send us an email

Send an email

Thin films

MAGEVA

Description

The MAGEVA thin film deposition system is a flexible tool, which operates, ALL IN ONE, either in thermal evaporation (150 A) or sputter deposition with a magnetron (up to diameter 4''). The user can switch the process in less than 10 min.

Compact, for better utilization of clean room and laboratory space, the frame is equipped with wheels for quick and effortless transportation.

The stainless steel chamber, fitted with turbo and rotary pumps, allows MAGEVA to pump down very quickly to high vacuum (10-6 mbar range). Fxation of substrates is very easy, due to the substrate holder design.

 

 

 

MAGEVA is provided with the following standard equipment :

  • 1 turbo pump + 1 rotary pump, automatically controlled
  • 1 Pirani/Penning gauge
  • 1 gate valve (for regulation)
  • 1 quartz crystal sensor with a Q-pod (thickness measurement)
  • 1 magnetron
  • 1 evaporation source on flange
  • 2 DC power supplies

MAGEVA, designed and made in France, carries the CE conformity marking.

 

Show more
  • Our standards
  • Description

Can't find the desired product? Contact us

Description

The MAGEVA thin film deposition system is a flexible tool, which operates, ALL IN ONE, either in thermal evaporation (150 A) or sputter deposition with a magnetron (up to diameter 4''). The user can switch the process in less than 10 min.

Compact, for better utilization of clean room and laboratory space, the frame is equipped with wheels for quick and effortless transportation.

The stainless steel chamber, fitted with turbo and rotary pumps, allows MAGEVA to pump down very quickly to high vacuum (10-6 mbar range). Fxation of substrates is very easy, due to the substrate holder design.

 

 

 

MAGEVA is provided with the following standard equipment :

  • 1 turbo pump + 1 rotary pump, automatically controlled
  • 1 Pirani/Penning gauge
  • 1 gate valve (for regulation)
  • 1 quartz crystal sensor with a Q-pod (thickness measurement)
  • 1 magnetron
  • 1 evaporation source on flange
  • 2 DC power supplies

MAGEVA, designed and made in France, carries the CE conformity marking.

 


If you want an offer, or more information on this product, contact us:

Fast delivery
in France and Europe

ISO 9001
and 14001 certifications

Service / Maintenance of
mechanical components