XTC series controllers

Download PDF documentation

Information guide

Thin film deposition controller for single and multiple-layer processes.

The XTC/3 with patended Modelock provides proven prevention for consistent quality.

With the XTC/3 Thin Film Deposition Controller, you get highly accurate control of deposition rate and thickness, the capacity for virtually any numbers of layers, easy installation, and extremely high reliability to ensure productivity.



  • Available in single-layer and multiple-layer models
  • Supports INFICON Crystal 12®, Crystal Six®, and dual sensor automatic crystal switching for maximum productivity
  • XTC/3M multiple-layer model supports up to 99 processes, 999 layers, 32 films, 2 sensors, and two sources
  • XTC/3S single-layer model supports up to 9 films, 2 sensors, and two sources
  • Ethernet connection available
  • Free-standing (no computer necessary) or optional Windows® software for PC operation
  • Plug-and-play replacement for INFICON XTC/2 controllers (limited to XTC/2 features and command set)

To learn more on the principe of use of quartz microbalances clic here

Show more