Thin films

Refractory materials

You have a question ?

You can reach us by phone on +33 (0)1 41 90 50 50 or send us an email

Send an email

Ceramic heaters

Information guide

 

The heating elements are made from a Pyrolytic Graphite (PG) electrical conductor, covered with a refractory insulator, Pyrolytic Boron Nitride (PBN).

 

 

 

Advantages 

  • UHV compatible
  • very good temperature homogeneity
  • operating temperature: 1500°C and higher
  • mechanically durable
  • termally shock resistant
  • power density: > 35 W/cm2
  • chemically inert to most corrosive gases

Applications

  • PVD and PECVD
  • Ion implantation
  • CVD and MOCVD
  • PLD (laser ablation)

Specific dimensions on request. 

Show more
Thin films

Disc heaters PBN/PG

Thin films

Disc heaters PBN/PG with tabs

Thin films

Rectangular PBN heaters