Technical guide about thin films deposition

Technical guide about thin films deposition

 

 

 

 

 

 

 

 

 

Find in the pdf file below a table with informations per material about deposition, as :

  • which deposition method to use
  • vapor pressures
  • recommended materials about liners and evaporation sources

as well as some useful informations for thin film deposition, either by evaporation technique (e-beam, thermal evaporation) or sputtering.

Download documentation

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