Diffusion pumps fluids
The ideal diffusion pump oil would be thermally stable, non-volatile, chemically inert and non-toxic. Real diffusion pump fluids, on the other hand, represent compromises between these properties; no one fluid does it all.
We offer a broad range of diffusion pump oils, including silicone, PFPE, polyphenyl ether fluids for a wide range of applications. These fluids include distilled hydrocarbons, silicones, organic esters and other synthetics. This wide selection ensures that we can supply the proper fluid for your application.
Silicone Fluids NE-704 / NE-705
Silicone fluids are the most used fluids in the difussion pumps for the following applications : vacuum deposition, pumping of electronic tubes, metallurgical works, heat treatments, vacuum metallizing.
We offer 2 fluids, NE-704 and NE-705, with a good resistance to the oxydation. They are chemically inert and do not react with metal pieces, elastomer seals and the most of gases.
These oils are used in the industrial and R&D fields.
PFPE FOMBLIN YH-VAC Fluids
Fomblin YH-VAC fluids (Y18/8 and Y25/9) are suggested for applications requiring a high quality vacuum such as in scanning electron and transmission microscopes, mass spectrometers, particle accelerators, ion implantation, plasma and vapor deposition processes, etc. In addition, it is recommended for pumps handling reactive gases such as UF6, UF2, Oxygen, Ozone, Tritium, etc. Direct contact with these gases will not result in any type of reaction or fluid degradation.
PFPE INLAND geminYe Fluids
GeminYe fluids (18-8 and 25-9) are suggested for applications requiring a high quality vacuum such as in scanning electron and transmission microscopes, mass spectrometers, particle accelerators, ion implantation, plasma and vapor deposition processes, etc. In addition, it is recommended for pumps handling reactive gases such as UF6, UF2, Oxygen, Ozone, Tritium, etc. Direct contact with these gases will not result in any type of reaction or fluid degradation.
The mineral oils Invoil, Invoil 20, Invoil 30, Invoil 46 are extracted from petroleum and distilled twice.
Invoil : specially distilled for use in diffusion pumps where pressure of 10-7 mbar is required. It is a standard fluid for mass spectrometers, leak detectors,distillation systems, and electron microscopes.
Invoil 20 : high quality, general purpose hydrocarbon diffusion pump fluid that works well in any diffusion pump. The fluid is designed to meet the vapor pressure requirements of a diffusion pump while exhibiting excellent thermal stability. Invoil 20 can also be used in a mechanical pump.
Invoil 30 : specially developed diffusion pump fluid which is double distilled. This hydrocarbon is modified for high temperature use with a strong antioxidant. Invoil 30 can be used in applications such as metallizing, optical and microelectric coatings, sputtering, and metallurgy.
Invoil 46 : synthetic (arylalkyldiphenylether) diffusion pump fluid whose performance combines the best properties of silicones and polyphenyl ethers. It was developed to accommodate the performance requirements of such applications such as CRT evacuation, optical coatings, evaporation and sputtering, vacuum metallurgy, leak detection, and mass spectrometry.
Polyphenyl-ether SANTOVAC 5 Fluid
Santovac 5 is polyphenyl ether synthetic diffusion pump fluid capable of producing ultra-high vacuum in the 10-10 mbar range. Due to this fluid’s extremely low vapor pressure, backstreaming characteristics are lower than any other fluid resulting in less contamination and longer operation. Santovac 5 has exceptionally low volatility and is thermally stable, non-halogenated water white fluids. It exhibits extraordinary resistance to degradation from heat, oxygen, radiation and chemical attack. This lubricant is designed for applications where extremely high temperatures and adverse environments are expected. It is compatible with most metals and elastomers commonly used in vacuum pumps.
Santovac 5 is ideal for use in many applications including laboratory, analytical and research operation, vacuum production, thin films, space simulation chambers, and optical coatings.
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