Sputtering targets

cibles neyco

Neyco provides several types of targets for sputtering:

  • Pure metal and alloy targets, purity from 99% to 99.999 %.
  • Hot pressed oxides and intermetallic targets without binder: Al2O3, AZO, ITO, PZT, SiO2, ZnO...
  • Industrial application targets: Al, Ni/Cr, Mo, Ta, Ti/Al, W …

Most sputtering targets can be fabricated into a wide range of shapes and sizes such as : circular, rectangular, Delta, ring, tube and more on request. 

There are some technical limitations to the maximum size for a given single piece construction. In such cases, a multi-segmented target can be produced with the individual segments joined together by butt or beveled joints.

All targets are delivered with a certificate of analysis.

The materials are checked before shipping with a X-fluorescence analyzer. Certificate on request. 

Targets Silicon base, Si

Stock products

P/N Material Purity Dimensions Thickness Quantity
SI2PX3MM5N Si 99.999% 2" (50.8 mm) 3 mm Add In stockIn stock
SI2PX6.35MM5N Si 99.999% 2" (50.8 mm) 6.35 mm Add In stockIn stock
SI2PX6MM5N Si 99.999% 2" (50.8 mm) 6 mm Add In stockIn stock
SI3PX3MM5N Si 99.999% 3" (76.2 mm) 3 mm Add In stockIn stock
SI3PX6MM5N Si 99.999% 3" (76.2 mm) 6 mm Add In stockIn stock
SIO22PX3MM4N5 SiO2 99.995% 2" (50.8 mm) 3 mm Add In stockIn stock
SIO22PX6MM4N5 SiO2 99.995% 2" (50.8 mm) 6 mm Add In stockIn stock
SIO23P3MM4N5 SiO2 99.995% 3" (76.2 mm) 3 mm Add In stockIn stock
SIO23PX6MM4N5 SiO2 99.995% 3" (76.2 mm) 6 mm Add
SIO275X5MM4N5 SiO2 99.995% 75 mm 5 mm Add In stockIn stock

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Our customized products

Formula Pureté Dimensions Quantity
Si Add
Si3N4 Add
Si/Al (97/3at%) Add
Si/Al (96/4wt%) Add
Si/Al (95/5wt%) Add
Si/Al (92/8wt%) Add
Si/Al (75/25wt%) Add
SiC Add
Si/Cr (96/4at%) Add
Si/Ge (80/20at%) Add
Si/Ge (50/50at%) Add
SiO Add
SiO2 Add
SiS2 Add

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Can not find the desired product? Contact us

NEYCO
30 avenue de la Paix
92170 VANVES
Tel:+33(0)1 41 90 50 50
Fax:+33(0)1 41 90 50 51
e-mail: contact[@]neyco.fr